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AURA use case

Gas-bearing workflow for semiconductor inspection and positioning subsystems.

Semiconductor inspection and positioning equipment rewards cleanliness, low friction, and repeatability, but a rotating gas-bearing subsystem still has to earn its decision through stiffness, damping, flow, tolerance sensitivity, dynamics, and validation scope.

Good-fit signals

  • Wafer-inspection and metrology spindles
  • Rotary stages or inspection-adjacent rotating subsystems
  • Clean non-contact support with tight error-motion demands
  • Early architecture and evidence review before prototype lock

Decision risks AURA exposes

  • Repeatability language hides rotor-response risk
  • Flow, supply quality, and pressure limits are not explicit
  • Surface finish, clearance, and thermal drift are detached from coefficients
  • Factory evidence has no recorded site operating envelope

Current AURA fit is deliberately narrow

Inside the present scope

Gas-static bearing decisions for rotating precision subsystems: spindle layout, support topology, coefficient evidence, rotor-dynamic screening, validation provenance, and the boundary between a calculation pass and engineering release.

Outside the present claim

Generic planar-stage design, servo-control synthesis, full cleanroom qualification, contamination certification, nanometre positioning performance prediction, and production release without case-specific test evidence.

Evidence the precision claim depends on

A clean non-contact architecture does not by itself establish precision. The decision package has to connect the manufactured air gap and surface state to K/C evidence, the support state to rotor response, and the factory test state to the intended duty cycle, mounting, thermal environment, and process loads.

What AURA produces

AURA complements the team's CAE, controls, metrology, and prototype program with a reviewable requirement-to-decision layer for the rotating gas-bearing subsystem.

1. Precision requirement Error-motion objective, RPM corridor, loads, environment, duty cycle, and consequence.
2. Support architecture Topology, preload concept, rotor span, overhang, and supply constraints.
3. Coefficient evidence K/C/Q values tied to clearance, geometry, restrictors, gas state, and method provenance.
4. Dynamic screen Critical-speed separation, response, stability, orbit, and clearance-facing margins.
5. Evidence boundary What the model supports now, what must be measured, and what cannot yet be claimed.
Claim boundary: AURA supports scoped engineering screening and decision packages. It does not make a universal production-validation claim without case-specific evidence.
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